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Proceedings Paper

Advanced laser processing of glass materials
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Paper Abstract

Three kinds of advanced technologies using lasers for glass microprocessing are reviewed. Simultaneous irradiation of vacuum ultraviolet (VUV) laser beam, which possesses extremely small laser fluence, with ultraviolet (UV) laser achieves enhanced high surface and edge quality ablation in fused silica and other hard materials with little debris deposition as well as high-speed and high-efficiency refractive index modification of fused silica (VUV-UV multiwavelength excitation processing). Metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials, resulting in surface microstructuring, high-speed holes drilling, crack-free marking, color marking, painting and metal interconnection for the various kinds of glass materials (laser-induced plasma-assisted ablation (LIPAA)). In the meanwhile, a nature of multiphoton absorption of femtosecond laser by transparent materials realizes fabrication of true three-dimensional microstructures embedded in photosensitive glass.

Paper Details

Date Published: 2 September 2003
PDF: 11 pages
Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); doi: 10.1117/12.515607
Show Author Affiliations
Koji Sugioka, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Kotaro Obata, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Ya Cheng, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Katsumi Midorikawa, The Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 5121:
Laser Processing of Advanced Materials and Laser Microtechnologies
Friedrich H. Dausinger; Vitali I. Konov; Vladimir Yu. Baranov; Vladislav Ya. Panchenko, Editor(s)

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