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Proceedings Paper

Results of a long-term test of an ArF mini-excimer laser
Author(s): Andreas Goertler; C. Hartmann; C. Strowitzki
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Paper Abstract

A mini-excimer laser with a specially designed laser tube was operated at a constant energy of 8 mJ and a constant repetition rate of 500 Hz at 193 nm. A long-term test of this laser system was done. The output energy was constant over the test interval of 1.5 billion pulses. The pulse-to-pulse stability was constant over the total test period. The test was done without changing or cleaning the resonator optics.

Paper Details

Date Published: 10 November 2003
PDF: 4 pages
Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); doi: 10.1117/12.515516
Show Author Affiliations
Andreas Goertler, TuiLaser AG (Germany)
C. Hartmann, TuiLaser AG (Germany)
C. Strowitzki, TuiLaser AG (Germany)


Published in SPIE Proceedings Vol. 5120:
XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Krzysztof M. Abramski; Edward F. Plinski; Wieslaw Wolinski, Editor(s)

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