Share Email Print

Proceedings Paper

Oscillation characteristics of a discharge pumped VUV Kr excimer laser
Author(s): Takahiro Shirai; Takeshi Higashiguchi; Shoichi Kubodera; Wataru Sasaki; Junji Kawanaka; Tatsushi Igarashi
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have used a pair of newly constructed electrodes to improve the discharge stability and electrical input power. The electrode shape was designed so that the discharge width became narrower, which lead to the increase of the input power density by 22%. As a result, the maximum output energy increased from 150 to 200 μJ at 147.8 nm. The pulse duration of 250 ns (FWHM) became shorter compared to the previous result (400 ns). This long pulse operation indicated the laser oscillation in an afterglow mode. The laser beam shape was circular with a beam divergence of 2.5 mrad. Because of the long pulse duration, this beam shape reflected on a cavity mode (multi-mode) as a result of the optical feedback. A small signal gain coefficient increased almost linearly with the increase of the discharge voltage. The maximum gain coefficient at 147.8 nm was 3.5%cm-1 at 31 kV.

Paper Details

Date Published: 10 November 2003
PDF: 4 pages
Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); doi: 10.1117/12.515513
Show Author Affiliations
Takahiro Shirai, Miyazaki Univ. (Japan)
Takeshi Higashiguchi, Miyazaki Univ. (Japan)
Shoichi Kubodera, Miyazaki Univ. (Japan)
Wataru Sasaki, Miyazaki Univ. (Japan)
Junji Kawanaka, Japan Atomic Energy Research Institute (Japan)
Tatsushi Igarashi, Gigaphoton, Inc. (Japan)

Published in SPIE Proceedings Vol. 5120:
XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Krzysztof M. Abramski; Edward F. Plinski; Wieslaw Wolinski, Editor(s)

© SPIE. Terms of Use
Back to Top