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Proceedings Paper

Indium tin oxide coatings on flexible and rigid substrates for application in smart windows
Author(s): M. S. Vinodh; Sangeneni Mohan; P. Subaskar; - Rathnakar; H. Bhojraj; H. Narayanamurthy
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Paper Abstract

Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10Ω/∠ was achieved.

Paper Details

Date Published: 14 October 2003
PDF: 8 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514907
Show Author Affiliations
M. S. Vinodh, Indian Institute of Science (India)
Sangeneni Mohan, Indian Institute of Science (India)
P. Subaskar, Indian Space Research Organisation Satellite Ctr. (India)
- Rathnakar, Indian Space Research Organisation Satellite Ctr. (India)
H. Bhojraj, Indian Space Research Organisation Satellite Ctr. (India)
H. Narayanamurthy, Indian Space Research Organisation Satellite Ctr. (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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