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Proceedings Paper

Design and analysis of micro-opto-electro-mechanical accelerometer
Author(s): Jagannath Nayak; Talabuttala Srinivas; Ananth Selvarajan; D. V. K. Sastry; M. P. Unnikrishanan
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Paper Abstract

Integrated optics combined with micro-electro mechanical system (MEMS) technology offer enormous potential to improve sensitivity and performance capabilities of new sensors. In this paper, an analysis is carried out to find the feasibility and design concept of a Micro-Opto-Electro-Mechanical (MOEM) accelerometer consisting of integrated optic Mach-Zehnder interferometer, whose sensing arm is attached to a micromachined vibrating cantilever or a bridge. The analysis consists of determining changes in phase shift due to acceleration-induced refractive index and optical path length variation of MachZehender interferometer. A noise analysis is carried out to find the fundamental performance limit of different sensor configurations.

Paper Details

Date Published: 14 October 2003
PDF: 7 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514906
Show Author Affiliations
Jagannath Nayak, Research Ctr. Imarat (India)
Talabuttala Srinivas, Indian Institute of Science (India)
Ananth Selvarajan, Indian Institute of Science (India)
D. V. K. Sastry, Research Ctr. Imarat (India)
M. P. Unnikrishanan, Research Ctr. Imarat (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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