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Proceedings Paper

Uncooled IR sensor based on MEMS technology
Author(s): Deepika Khilnaney; Alok Jain; C. R. Jalwania; Vinoy K. Jain
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Paper Abstract

In this paper we present a modified design based on thermal characterization of the membrane of microbolometer based infrared detectors. Theoretical calculations show that the thermal conductance should be of the order of 10-5 W/K for 100 μm x 100 μm membrane size with the hinges of length 2 μm whereas our experimental results show that it is of the order of 10-7 W/K. These results are explained on the basis of reduced value of the thermal conductivity of thin films compared to their bulk value. A model has been presented to explain the results.

Paper Details

Date Published: 14 October 2003
PDF: 8 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514904
Show Author Affiliations
Deepika Khilnaney, Univ. of Missouri-Columbia (United States)
Alok Jain, Solid State Physics Lab. (India)
C. R. Jalwania, Solid State Physics Lab. (India)
Vinoy K. Jain, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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