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Proceedings Paper

Ion-assisted deposition processes: industrial network IntIon
Author(s): Henrik Ehlers; Karl-Josef Becker; Rudolf Beckmann; Nils Beermann; Ulf Brauneck; Peter Fuhrberg; Dieter Gaebler; Stefan Jakobs; Norbert Kaiser; Michael Kennedy; Friedrich Koenig; Sven Laux; Juergen Christian Mueller; Bernd Rau; Werner Riggers; Detlev Ristau; Dieter Schaefer; Olaf Stenzel
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Paper Abstract

The presented work is embedded in the research network “Integrative Ion Processes for Modern Optics”, called IntIon, consisting of 12 partners from the German optics industry and two research institutes. The main target of the IntIon network is the development of new process concepts on the basis of ion assisted deposition (IAD) for the industrial production of optical thin film components. Besides an improvement in efficiency, a major aim is concentrated on the optical characteristics for selected application fields with high economical potential. In this network, different ion and plasma sources are compared with regard to their qualification for ion assisted deposition processes. This work includes the characterization of the ion energy and ion current using Faraday-cup measurements. The selection of investigated coating materials includes a broad variety of standard and non-standard oxides. First results of the network will be presented for adapted deposition materials and different operation characteristics of ion sources.

Paper Details

Date Published: 25 February 2004
PDF: 10 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.514817
Show Author Affiliations
Henrik Ehlers, Laser Zentrum Hannover e.V. (Germany)
Karl-Josef Becker, Rupp und Hubrach Optik GmbH (Germany)
Rudolf Beckmann, Leybold Optics GmbH (Germany)
Nils Beermann, Laser Zentrum Hannover e.V. (Germany)
Ulf Brauneck, Schott Glas Intervac AG (Germany)
Peter Fuhrberg, LISA Laser Products OHG (Germany)
Dieter Gaebler, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Stefan Jakobs, mso jena Mikroschichtoptik GmbH (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Michael Kennedy, LINOS Photonics GmbH & Co. KG (Germany)
Friedrich Koenig, Merck KGaA (Germany)
Sven Laux, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Juergen Christian Mueller, Dr. Juergen Christian Mueller Vakuum-/Duennschicht-Technik (Germany)
Bernd Rau, Roth & Rau Oberflaechentechnik AG (Germany)
Werner Riggers, Laseroptik GmbH (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)
Dieter Schaefer, Quarterwave GmbH (Germany)
Olaf Stenzel, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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