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Proceedings Paper

Plasma diagnostics of Ge-clusters in Si1-xGex mixed crystals
Author(s): Yu. S. Gordeev; Valery M. Mikoushkin; V. V. Brysgalov; Andrej G. Zabrodskii; M. V. Alekseenko; H. Grimmeiss
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Paper Abstract

Mixed Crystals of Si1-xGex (x < 0.05) grown by the method of zone melting have been studied by Electron Energy Loss Spectroscopy (EELS) in recoil. The contribution of Ge-bulk plasmon spectrum was revealed in the plasmon spectra of Mixed Crystals, and the conclusion has been made that an essential part of Ge atoms are included into Ge clusters. Plasma diagnostics of clusters in SiGe alloys is suggested on the basis of EEL spectroscopy.

Paper Details

Date Published: 11 June 2003
PDF: 4 pages
Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); doi: 10.1117/12.514645
Show Author Affiliations
Yu. S. Gordeev, A.F. Ioffe Physico-Technical Institute (Russia)
Valery M. Mikoushkin, A.F. Ioffe Physico-Technical Institute (Russia)
V. V. Brysgalov, A.F. Ioffe Physico-Technical Institute (Russia)
Andrej G. Zabrodskii, A.F. Ioffe Physico-Technical Institute (Russia)
M. V. Alekseenko, A.F. Ioffe Physico-Technical Institute (Russia)
H. Grimmeiss, Lunds Univ. (Sweden)


Published in SPIE Proceedings Vol. 5023:
10th International Symposium on Nanostructures: Physics and Technology

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