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Proceedings Paper

Theoretical modeling, design, fabrication, and testing of porous-silicon-based capacitive vapor sensor
Author(s): J. Das; S. M. Hossain; S. Dey; H. Saha
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Paper Abstract

Capacitive type vapour sensor based on porous silicon (PS) transducer has been presented. Sensing mechanism of ambient vapour concentration by PS has been modeled with an effective medium approximation (EMA) considering adsorption-diffusion-condensation kinetics of vapour molecules inside the porous bulk. Optimized pore size and pore morphology for sensing of different vapours having widely different molecular weight and volume selectively have also been studied.

Paper Details

Date Published: 14 October 2003
PDF: 5 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514574
Show Author Affiliations
J. Das, Jadavpur Univ. (India)
S. M. Hossain, Jadavpur Univ. (India)
Asansol Engineering College (India)
S. Dey, Jadavpur Univ. (India)
H. Saha, Asansol Engineering College (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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