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Proceedings Paper

Vibration sensors
Author(s): Amita Gupta; Ranvir Singh; Amir Ahmad; Mahesh Kumar
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Paper Abstract

Today, vibration sensors with low and medium sensitivities are in great demand. Their applications include robotics, navigation, machine vibration monitoring, isolation of precision equipment & activation of safety systems e.g. airbags in automobiles. Vibration sensors have been developed at SSPL, using silicon micromachining to sense vibrations in a system in the 30 - 200 Hz frequency band. The sensing element in the silicon vibration sensor is a seismic mass suspended by thin silicon hinges mounted on a metallized glass plate forming a parallel plate capacitor. The movement of the seismic mass along the vertical axis is monitored to sense vibrations. This is obtained by measuring the change in capacitance. The movable plate of the parallel plate capacitor is formed by a block connected to a surrounding frame by four cantilever beams located on sides or corners of the seismic mass. This element is fabricated by silicon micromachining. Several sensors in the chip sizes 1.6 cm x 1.6 cm, 1 cm x 1 cm and 0.7 cm x 0.7 cm have been fabricated. Work done on these sensors, techniques used in processing and silicon to glass bonding are presented in the paper. Performance evaluation of these sensors is also discussed.

Paper Details

Date Published: 14 October 2003
PDF: 6 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514573
Show Author Affiliations
Amita Gupta, Solid State Physics Lab. (India)
Ranvir Singh, Solid State Physics Lab. (India)
Amir Ahmad, Solid State Physics Lab. (India)
Mahesh Kumar, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems

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