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Proceedings Paper

Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA
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Paper Abstract

This paper mainly reviews the current status of the LIGA fabrication technology for use in microfluidics applications. It also presents the work that the group is involved in the fabrication of 3-D high aspect ratio structures. This work explored the possibility of using LIGA and excimer laser micromachining as complimentary processes in two sequential steps for making some of the components required for fluidic applications. A microflask is designed and fabricated using this combination of processing technology. The details of the design and fabrication technology are presented in this paper.

Paper Details

Date Published: 14 October 2003
PDF: 5 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514474
Show Author Affiliations
Muralidhar K. Ghantasala, Swinburne Univ. of Technology (Australia)
Richard C. Barber, Swinburne Univ. of Technology (Australia)
Nicolai A. Moldovan, Argonne National Lab. (United States)
Derrick C. Mancini, Argonne National Lab. (United States)
Erol C. Harvey, Swinburne Univ. of Technology (Australia)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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