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Proceedings Paper

Methods of scattered laser radiation analyzing for metrology of the precise
Author(s): Valentina V Azarova; Yuri D Goliyaev; Nataly Efremova; George Kolodnyi
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Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, ; doi: 10.1117/12.514425
Show Author Affiliations
Valentina V Azarova, POLYUS Research and Development Institute (Russia)
Yuri D Goliyaev, POLYUS Research and Development Institute (Russia)
Nataly Efremova, POLYUS Research & Development Institute (Russia)
George Kolodnyi, POLYUS Research and Development Institute (Russia)


Published in SPIE Proceedings Vol. 5252:
Optical Fabrication, Testing, and Metrology
Roland Geyl; David Rimmer; Lingli Wang, Editor(s)

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