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Proceedings Paper

Vibration measurement of microcomponents by fringe projection method
Author(s): Tao Wu; ChoJui Tay; Chenggen Quan; Shihua Wang; HuaiMin Shang
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Paper Abstract

This paper presents an optical fringe projection method for measuring the dynamic micro-components. Using a programmable liquid crystal display (LCD) projector and a long working distance microscope (LDM), sinusoidal fringes are projected onto a micro-component. The image of the fringe pattern is captured by another LDM and a high-speed camera and subsequently processed by the Fast Fourier Transform (FFT) technique. A simple procedure is described which enables calibration of the optical setup for subsequent amplitude and frequency measurement of the vibrating components. To overcome the underexposure problem, a white light source (WLS) is incorporated and the dynamic range of the camera is increased by a factor of 6. Discrepancy in the measured vibration amplitude is less than 1%.

Paper Details

Date Published: 24 April 2003
PDF: 12 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.514242
Show Author Affiliations
Tao Wu, National Univ. of Singapore (Singapore)
ChoJui Tay, National Univ. of Singapore (Singapore)
Chenggen Quan, National Univ. of Singapore (Singapore)
Shihua Wang, National Univ. of Singapore (Singapore)
HuaiMin Shang, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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