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Proceedings Paper

Picometer-resolution assessment of the period constancy in a FBG phase mask
Author(s): Yves Jourlin; Alexandre V. Tishchenko; C. Pedri; Andrew G. Zanzal; James Unruh
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Paper Abstract

An ultra-high resolution measurement technique makes the assessment of the period uniformity in a long grating used as a phase mask for Fibre Bragg Gratings (FBG). It comprizes a pair of two identical displacement sensors placed close to each other at a strictly constant spacing flying over the grating under test at an essentially constant velocity. The phase difference between the two sensors is a simple function of the local spatial frequency of the grating. A proper solution of an inverse problem provides the period variation along the grating. The technique is used here to characterize phase masks fabricated by means of a MEBES 4500 electron beam pattern generator. The period does not deviate by more than 3 pm from the prescribed period over a length by more than 100 mm.

Paper Details

Date Published: 26 February 2004
PDF: 8 pages
Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513696
Show Author Affiliations
Yves Jourlin, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Alexandre V. Tishchenko, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
C. Pedri, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Andrew G. Zanzal, Photronics, Inc. (United States)
James Unruh, Photronics, Inc. (United States)

Published in SPIE Proceedings Vol. 5252:
Optical Fabrication, Testing, and Metrology
Roland Geyl; David Rimmer; Lingli Wang, Editor(s)

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