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Proceedings Paper

Wafer-scale measurement of the modes of a dielectric multilayer
Author(s): Marwan Abdou Ahmed; Florent Pigeon; Olivier M. Parriaux; Svetlen H. Tonchev; Nikolay M. Lyndin
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Paper Abstract

Prism and grating coupling techniques can be used to retrieve the refractive index and thickness of a thin film or a stack of layers from the measurement of the effective index of the guided modes they propagate. These techniques are discussed as possible means to assess the wafer scale index and thickness uniformity in the prespective of the batch manufacturing of resonant gratings. The application example considered is a grating polarizer used as a microlaser polarizing mirror.

Paper Details

Date Published: 25 February 2004
PDF: 6 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.513690
Show Author Affiliations
Marwan Abdou Ahmed, TSI Lab., CNRS-Univ. Jean Monnet Saint-Etienne (France)
Florent Pigeon, TSI Lab., CNRS-Univ. Jean Monnet Saint-Etienne (France)
Olivier M. Parriaux, TSI Lab., CNRS-Univ. Jean Monnet Saint-Etienne (France)
Svetlen H. Tonchev, Bulgarian Academy of Sciences (Bulgaria)
Nikolay M. Lyndin, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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