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Proceedings Paper

High-resolution metrology of optical components by spectral interferometry
Author(s): David Reolon; Gerald Brun; Karim Ben Houcine; Isabelle Verrier; Colette Veillas; Maxime Jacquot
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Paper Abstract

In this paper we describe an interferometric process using a polychromatic light source and a spectroscopic detection system. This method is used for surface metrology or for bulk optical components characterisation (dispersion for example). As classical monochromatic interferometry, it consists in comparing a reference wave front with one issued from the component to be tested. However this measurement is assumed by determination of the spectral dispersion induced upon the various frequencies of the light source spectrum. The aim of this work is both dispersion measurements and characterisation of aspherical surfaces

Paper Details

Date Published: 26 February 2004
PDF: 10 pages
Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513400
Show Author Affiliations
David Reolon, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Gerald Brun, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Karim Ben Houcine, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Isabelle Verrier, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Colette Veillas, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)
Maxime Jacquot, Univ. Jean Monnet Saint-Etienne (France)
LTSI-CNRS (France)


Published in SPIE Proceedings Vol. 5252:
Optical Fabrication, Testing, and Metrology
Roland Geyl; David Rimmer; Lingli Wang, Editor(s)

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