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Proceedings Paper

Three-dimensional CMOS image sensor with 4x64 pixel array
Author(s): Omar M. Elkhalili; Olaf Schrey; Ralf F. Jeremias; Peter Mengel; Martin Petermann; Werner Brockherde; Bedrich J. Hosticka
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Paper Abstract

A 3D CMOS imager based on time-of-flight (TOF) has been developed and successfully tested. It uses an active pulsed class 1 laser operating at 905nm to illuminate a 3D scene. The scene depth is determined by measurement of the travel time of reflected pulses by employing a fast on-chip synchronous shutter. A so-called “Multiple Double Short Time Integration” (MDSI) enables suppression of the background illumination and correction for reflectivity variations in the scene objects. The sensor chip contains 2 pixel lines with each pixel containing twin photodiodes, thus the chip contains 4×64 sensors. The chip allows two operating modes; the first is the binning mode (mode0 and mode1 are activated), where the twin pixels are short-circuited (tow lines on the die) and the average signal is measured. The second mode is the high-resolution mode (either mode0 or mode1 is activated). In this mode the pixels operate separately (four lines on the die). The chip has been realized in 0.5μm n-well standard CMOS process. The pixel pitch is 130μm. To get a good fill factor, the readout circuitry is located at the sides of the chip.

Paper Details

Date Published: 19 February 2004
PDF: 9 pages
Proc. SPIE 5251, Detectors and Associated Signal Processing, (19 February 2004); doi: 10.1117/12.512930
Show Author Affiliations
Omar M. Elkhalili, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)
Olaf Schrey, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)
Ralf F. Jeremias, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)
Peter Mengel, Siemens AG (Germany)
Martin Petermann, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)
Werner Brockherde, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)
Bedrich J. Hosticka, Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme (Germany)


Published in SPIE Proceedings Vol. 5251:
Detectors and Associated Signal Processing
Jean-Pierre Chatard; Peter N. J. Dennis, Editor(s)

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