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Proceedings Paper

Thick silver coating deposited by DC magnetron sputtering
Author(s): Pham Hong Tuan; Dang Xuan Cu
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Paper Abstract

Due to high conductivity, silver coating is often used as high reflectivity mirror in optical and in microwave spectrum area. The thickness of silver film in optical application is usually less than the one used in microwave range. Thin silver coating has been successfully deposited by thermal evaporation. Meanwhile thick silver film of tens micrometer is often made by electrochemical process. DC magnetron is well known as good method for depositing metallic coating. Here we present an attempt to apply DC magnetron sputtering for depositing thick silver mirror. Results show that coating made by this method meet well the requirements in microwave range.

Paper Details

Date Published: 25 February 2004
PDF: 4 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.512891
Show Author Affiliations
Pham Hong Tuan, National Ctr. for Technology Progress (Vietnam)
Dang Xuan Cu, National Ctr. for Technology Progress (Vietnam)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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