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Proceedings Paper

Soft x-ray reflectometry of multilayer coatings using a laser-plasma source
Author(s): David L. Windt; Warren K. Waskiewicz
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Paper Abstract

A new high-resolution soft x-ray reflectometer system utilizing a laser-plasma light source is described. This reflectometer is used to measure the reflectance of multilayer-coated optics for projection lithography. A detailed description of the instrument is presented, along with recent results obtained for a variety of soft x-ray multilayer coatings, multilayer-coated figured optics, and patterned x-ray reflection masks

Paper Details

Date Published: 1 January 1992
PDF: 15 pages
Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); doi: 10.1117/12.51277
Show Author Affiliations
David L. Windt, AT&T Bell Labs. (United States)
Warren K. Waskiewicz, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 1547:
Multilayer Optics for Advanced X-Ray Applications
Natale M. Ceglio, Editor(s)

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