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Proceedings Paper

Design and fabrication of biperiodic AR gratings for the infrared
Author(s): Ludovic Escoubas; Michele Loli; Jean-Jacques Simon; Hugues Giovannini; Francois Flory; Frederic Lemarquis; Stefan Enoch; Gerard Berginc
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Paper Abstract

We have designed and fabricated a silicon grating which shows antireflection properties in the [4μm ; 6 μm] spectral region. It is shown both theoretically and experimentally that, even if the refractive index and the grating period are in the extend that a simple homogenization theory can not be used, a substantial broadband antireflection effect can be obtained. The grating was made using a wet anisotropic etching technique. The reflectance was calculated with a modal method and compared successfully with the experimental results. It is shown that the grating reduces the silicon substrate reflectance in the whole [4 μm ; 6 μm] spectral domain by a factor greater than 10.

Paper Details

Date Published: 25 February 2004
PDF: 8 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.512709
Show Author Affiliations
Ludovic Escoubas, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Supeieure de Physique de Marseille (France)
Michele Loli, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Jean-Jacques Simon, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Hugues Giovannini, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Francois Flory, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Frederic Lemarquis, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Stefan Enoch, Institut Fresnel, CNRS-ENSPM (France)
Ecole Nationale Superieure de Physique de Marseille (France)
Gerard Berginc, Thales Optronique SA (France)


Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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