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Proceedings Paper

Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence
Author(s): Saulius Nevas; Farshid Manoocheri; Erkki Ikonen; Alexander V. Tikhonravov; Michail A. Kokarev; Michail K. Trubetskov
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Paper Abstract

Oblique-incidence spectrophotometric measurements are considered for reliable determination of the refractive index and thickness of thin-film coatings. By using a model of the spectral transmittance of thin film samples, the effect of systematic factors on the determined thin-film parameters is analyzed. The optical parameters of a silicon-dioxide sample determined from the experimental results obtained with the HUT spectrophotometer are consistent for the incidence angles between 0 and 56.4 degrees, demonstrating high accuracy of film-parameter determination.

Paper Details

Date Published: 25 February 2004
PDF: 9 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.512700
Show Author Affiliations
Saulius Nevas, Helsinki Univ. of Technology (Finland)
Farshid Manoocheri, Helsinki Univ. of Technology (Finland)
Erkki Ikonen, Helsinki Univ. of Technology (Finland)
Alexander V. Tikhonravov, Moscow State Univ. (Russia)
Michail A. Kokarev, Moscow State Univ. (Russia)
Michail K. Trubetskov, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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