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Proceedings Paper

Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
Author(s): Maria Teresa Rodrigo; Jorge Diezhandino; German Vergara; Gloria Perez; Maria del Carmen Torquemada; Fernando Jose Sanchez; Víctor Villamayor; Rosa Almazan; Marina Verdu; Ines Genova; Purificacion Rodriguez; Luis Jorge Gomez; Irene Catalan; Julio Plaza; Maria Teresa Montojo
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Paper Abstract

A technology to process uncooled polycrystalline PbSe IR detectors on interference filters has been developed. Thus, the lead salt natural spectral response can be modified as required. PbSe is deposited, processed and sensitized, following a unique method, on an interference filter made up of a sapphire or silicon substrate and a Ge/SiO multilayer structure. Unlike standard polycrystalline PbSe processing methods, we deposit PbSe by sublimation in vacuum. As-deposited, PbSe is not sensitive to infrared light. In order to turn it photosensitive it is necessary to expose the films to specific thermal treatments. We have developed a very efficient sensitization process during which substrates are submitted to temperatures as high as 450 ºC. In this work we demonstrate that we are able to process a PbSe detector directly on top of an interference filter. Also, we present preliminary results regarding the compatibility of our technology with standard photolithography and dry etch techniques. Results obtained pave the way for the development of uncooled multicolor medium-wave infrared detectors.

Paper Details

Date Published: 19 February 2004
PDF: 6 pages
Proc. SPIE 5251, Detectors and Associated Signal Processing, (19 February 2004); doi: 10.1117/12.512601
Show Author Affiliations
Maria Teresa Rodrigo, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Jorge Diezhandino, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
German Vergara, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Gloria Perez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Maria del Carmen Torquemada, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Fernando Jose Sanchez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Víctor Villamayor, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Rosa Almazan, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Marina Verdu, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Ines Genova, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Purificacion Rodriguez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Luis Jorge Gomez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Irene Catalan, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Julio Plaza, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Maria Teresa Montojo, Ctr. de Investigacion y Desarrollo de la Armada (Spain)


Published in SPIE Proceedings Vol. 5251:
Detectors and Associated Signal Processing
Jean-Pierre Chatard; Peter N. J. Dennis, Editor(s)

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