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Proceedings Paper

Characterization of SnO2 GIAR films
Author(s): Meiman Kentjana; Hitoshi Homma; Ercan E. Alp; Timothy M. Mooney
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Paper Abstract

In an attempt to develop a monochromator of synchrotron radiation ((Delta) E approximately 10-6 eV) using grazing incidence antireflection (GIAR) principle, we made SnO2 GIAR films on Pd (buffer layer) / (alpha) -Al2O3 (substrate). Films are fabricated by magnetron sputtering technique and characterized film thickness and interface roughness by x-ray diffraction technique using the conventional and synchrotron radiation sources. We demonstrated the electronic scattering suppression of approximately 10-2 and that the present system is feasible to achieve the required goals for monochromatization of synchrotron radiation source for the energy range of 23.87 keV.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51257
Show Author Affiliations
Meiman Kentjana, Brooklyn College/CUNY (United States)
Hitoshi Homma, Brooklyn College/CUNY (United States)
Ercan E. Alp, Argonne National Lab. (United States)
Timothy M. Mooney, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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