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Proceedings Paper

Diffraction of multilayer-coated plane gratings in terms of the reciprocal space
Author(s): Yan Wu; William K. Warburton
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Paper Abstract

We present a model for multilayer coated plane gratings that uses a reciprocal space description similar to the standard treatment of crystal diffraction. This model enables us to separate the contributions from the multilayer coating and the underlying substrate. We demonstrate its use on laminar and blazed gratings, and show that it can be easily applied to more complicated grating substrates as well. Because the separation between the two terms is complete, we suggest replacing the multilayer term with a dynamic diffraction calculation when additional model accuracy is required.

Paper Details

Date Published: 1 January 1992
PDF: 10 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51256
Show Author Affiliations
Yan Wu, X-Ray Instrumentation Associates (United States)
William K. Warburton, X-Ray Instrumentation Associates (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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