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Proceedings Paper

Metrology of x-ray optics utilizing shearing interferometric techniques
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Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51255
Show Author Affiliations
Phillip C. Baker, Baker Consulting (United States)
Richard B. Hoover, NASA/Marshall Space Flight Ctr. (United States)

Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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