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Proceedings Paper

Metrology of x-ray optics utilizing shearing interferometric techniques
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Paper Abstract

This paper will discuss the optical testing of extreme grazing incidence mirror systems and normal incidence high-precision mirror systems during fabrication processing of the optical substrates. The optical metrology is closely coupled with an advanced material removal process which will be discussed in terms of the optical metrology. Interferometric data will be presented of the optical surfaces. Surface roughness data will be shown and discussed.

Paper Details

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51255
Show Author Affiliations
Phillip C. Baker, Baker Consulting (United States)
Richard B. Hoover, NASA/Marshall Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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