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Proceedings Paper

Design and analysis of soft x-ray imaging microscopes
Author(s): David L. Shealy; Cheng Wang; Wu Jiang; Richard B. Hoover
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Paper Abstract

The spherical Schwarzschild microscope for soft X-ray applications in microscopy and projection lithography consists of two concentric spherical mirrors configured such that the third-order spherical aberration and coma are zero. Since multilayers are used on the mirror substrates for X-ray applications, it is desirable to have only two reflecting surfaces in a microscope. To reduce microscope aberrations and increase the field of view, generalized mirror surface profiles are here considered. Based on incoherent and sine wave modulation transfer function calculations, the object plane resolution of a microscope has been analyzed as a function of the object height and numerical aperture (NA) of the primary for several spherical Schwarzschild, conic, and aspherical Head reflecting two-mirror microscope configurations. The Head microscope with a NA of 0.4 achieves diffraction limited performance for objects with a diameter of 40 microns. Thus, it seems possible to record images with a feature size less than 100 A with a 40x microscope when using 40 A radiation.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51229
Show Author Affiliations
David L. Shealy, Univ. of Alabama/Birmingham (United States)
Cheng Wang, Univ. of Alabama/Birmingham (United States)
Wu Jiang, Univ. of Alabama/Birmingham (United States)
Richard B. Hoover, NASA/Marshall Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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