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Proceedings Paper

Construction of a micro-zone-plate for a scanning x-ray microscope at Hefei
Author(s): Yong Feifei Zhao; Xingshu Xie; Xinya Lei; Youzhou Zhao; Lide Zhang
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Paper Abstract

At the Hefei Synchrotron Radiation Laboratory (HESYRL), beamline 6A is dedicated to soft x-ray imaging studies. We are constructing a prototype scanning soft x-ray microscope. An effort in the fabrication of microzone plate has been started. We have designed and fabricated the first Fresnel zone plate as a microzone plate in China. Our microzone plates are fabricated by UV exposure. The finest width of the outmost zone is about 0.5 micrometers . In this paper, we describe the design and fabrication of our microzone plate and report first results.

Paper Details

Date Published: 1 January 1992
PDF: 5 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51228
Show Author Affiliations
Yong Feifei Zhao, Univ. of Science and Technology of China (China)
Xingshu Xie, Univ. of Science and Technology of China (China)
Xinya Lei, Univ. of Science and Technology of China (China)
Youzhou Zhao, Li Shan Microelectronic Co. (China)
Lide Zhang, Li Shan Microelectronic Co. (China)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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