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Proceedings Paper

Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer
Author(s): Nikolay B. Voznesensky; Kyeong-Hee Lee; Vladimir K. Kirillovsky
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Paper Abstract

Problem of testing fine optics in industrial conditions with the highest accuracy is considered. Requirements to the quality of optical surfaces and wavefront errors referred to various kinds of optical systems are discussed. The disadvantages of the use of test parts with etalon surfaces in interferometric measurements are considered and the dead circle of the use of the unknown-shaped reference surfaces is revealed. The solution of this problem is proposed through application of the point diffraction interferometer (PDI). The advanced schematic of such an interferometer is presented; unlimited accuracy and industrial testing possibilities of the upgraded Linnik interferometer are discussed.

Paper Details

Date Published: 26 February 2004
PDF: 11 pages
Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.512231
Show Author Affiliations
Nikolay B. Voznesensky, VTT Optik Ltd. (Estonia)
Kyeong-Hee Lee, Korea Electrotechnology Research Institute (South Korea)
Vladimir K. Kirillovsky, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 5252:
Optical Fabrication, Testing, and Metrology
Roland Geyl; David Rimmer; Lingli Wang, Editor(s)

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