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Proceedings Paper

Resonant grating filters at oblique incidence
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Paper Abstract

We designed a tunable, oblique incidence resonant grating filter covering the c-band as drop device. Our resonant grating filter consists of a planar waveguide on a glass substrate covered by low index medium that separates the waveguide from the grating on top of it. With these 3 layers we reach a finesse of more than 3000, which would require much more layers in traditional thin film technology. The drop filter can be tuned by tilting the MEMS platform on which the filter will be glued. Tuning over the c-band will require tilt angles of 3° of the MEMS platform in both directions. Measurements indicate a resonance peak shift of 1.2% and a negligible shape change of the resonance peak from 1526nm at 45° angle of incidence to 1573nm at 53° with a full width at half maximum of 0.4nm. In this range the peak wavelength shift is linear with respect to the change of the AOI.

Paper Details

Date Published: 3 November 2003
PDF: 7 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.512221
Show Author Affiliations
Guido Niederer, Univ. de Neuchatel (Switzerland)
Martin Salt, Univ. de Neuchatel (Switzerland)
Hans Peter Herzig, Univ. de Neuchatel (Switzerland)
Hans Thiele, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Michael T. Gale, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Christian Zschokke, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Marc Schnieper, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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