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Proceedings Paper

Fabrication and analysis of Mo-Si multilayers
Author(s): Lawrence Shing; Richard C. Catura
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Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51220
Show Author Affiliations
Lawrence Shing, Lockheed Palo Alto Research Lab. (United States)
Richard C. Catura, Lockheed Palo Alto Research Lab. (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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