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Proceedings Paper

Reflectivity measurements of Ni/V, Ni/Ti, and W/C multilayer mirrors in the 2-6nm wavelength region using synchrotron radiation
Author(s): Hiroshi Nagata; Yukinobu Ishino; Shoji Seki; Masataka Shin'ogi; Tsuneaki Miyahara
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Paper Abstract

Recent progress in the fields of physical vapor deposition (PVD), coupled with increased interest in the soft x-ray region of the electromagnetic spectrum, has driven the development of layered synthetic microstructures (LSMs) to the point that useful nongrazing incidence optics based on this technology are used in a variety of applications (e.g., solar astronomy, soft x-ray microscopy, and plasma spectroscopy). Our goal, as a production facility for thin film devices, was to demonstrate the capability for surement at 0.154 nm (CuK(alpha) ).

Paper Details

Date Published: 1 January 1992
PDF: 10 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51217
Show Author Affiliations
Hiroshi Nagata, Yoshida Nano-Mechanism Project/JRDC (Japan)
Yukinobu Ishino, Yoshida Nano-Mechanism Project/JRDC (Japan)
Shoji Seki, Yoshida Nano-Mechanism Project/JRDC (Japan)
Masataka Shin'ogi, Yoshida Nano-Mechanism Project/JRDC (Japan)
Tsuneaki Miyahara, National Lab. for High Energy Physics (Japan)

Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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