Share Email Print
cover

Proceedings Paper

Method for characterizing multilayer coatings on curved substrates
Author(s): George Gutman; Kevin Parker; James Scholhamer; James L. Wood
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The x-ray characterization of multilayer coatings at very low angles on curved substrates is limited by the radius of curvature and surface dimensions. Plane and cylindrical multilayers were manufactured in the same process and characterized as deposited. After flattening the cylindrical surface and curving the plane surface, the same were recharacterized. These measurements and the techniques used to characterize cylindrical surfaces are discussed with the goal of developing techniques for future application to the characterization of spherical, elliptical, or paraboloidal surfaces.

Paper Details

Date Published: 1 January 1992
PDF: 6 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51216
Show Author Affiliations
George Gutman, Ovonic Synthetic Materials Co. (United States)
Kevin Parker, Ovonic Synthetic Materials Co. (United States)
James Scholhamer, Ovonic Synthetic Materials Co. (United States)
James L. Wood, Ovonic Synthetic Materials Co. (United States)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

© SPIE. Terms of Use
Back to Top