Share Email Print
cover

Proceedings Paper

Evaluation of reflectors for soft x-ray optics
Author(s): Kazuyuki Etoh; Noriyoshi Hoshi; Toshihiro Yonemitu; Herve-Andre Durand; Jean-Jacques Delaunay; Kazuhiko Ito; Ichiro Yamada; Izumi Kataoka
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

It is necessary to characterize surface roughness in order to clarify the relation between reflectivity and roughness. A comparison between characterized roughness of direct measurement of surface and calculated roughness from measured reflectivity is made. Surface roughness was improved using the dual ion beam sputtering method as a parameter of assisting ion energy. As a result, those two roughnesses showed good agreement and the surface roughness becomes minimum at assisting ion energy of 50 eV.

Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51215
Show Author Affiliations
Kazuyuki Etoh, Japan Aviation Electronics Industry, Ltd. (Japan)
Noriyoshi Hoshi, Japan Aviation Electronics Industry, Ltd. (Japan)
Toshihiro Yonemitu, Japan Aviation Electronics Industry, Ltd. (Japan)
Herve-Andre Durand, Univ. Louis Pasteur/Strasbourg (France)
Jean-Jacques Delaunay, Univ. Louis Pasteur/Strasbourg (France)
Kazuhiko Ito, Japan Aviation Electronics Industry, Ltd. (Japan)
Ichiro Yamada, Japan Aviation Electronics Industry, Ltd. (Japan)
Izumi Kataoka, Japan Aviation Electronics Industry, Ltd. (Japan)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

© SPIE. Terms of Use
Back to Top