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Proceedings Paper

Comparison of measured and calculated values for the diffraction line profiles and integral reflection coefficients for multiple diffraction orders of multilayer structures
Author(s): Philip G. Burkhalter; John V. Gilfrich; R. K. Freitag; Herbert B. Rosenstock; Dennis B. Brown
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Paper Abstract

Double-crystal and single-crystal spectrometer measurements of line profile and integral reflection coefficient versus diffraction order are presented. These results are compared with theoretical predictions. The ability of the use of an intermediate layer in the theoretical model to explain the results is emphasized.

Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51213
Show Author Affiliations
Philip G. Burkhalter, Naval Research Lab. (United States)
John V. Gilfrich, SFA, Inc. (United States)
R. K. Freitag, Naval Research Lab. (United States)
Herbert B. Rosenstock, SFA, Inc. (United States)
Dennis B. Brown, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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