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Proceedings Paper

Tungsten/boron nitride multilayers for XUV optical applications
Author(s): Pierre Boher; Louis Hennet; F. Pierre; David J. Smith; Abhijit Uday Modak; M. Idir; Robert J. Barchewitz
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Paper Details

Date Published: 1 January 1992
PDF: 17 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51212
Show Author Affiliations
Pierre Boher, Labs. d'Electronique Philips (France)
Louis Hennet, Labs. d'Electronique Philips (France)
F. Pierre, Labs. d'Electronique Philips (France)
David J. Smith, Arizona State Univ. (United States)
Abhijit Uday Modak, Arizona State Univ. (United States)
M. Idir, Lab. de Chimie Physique/Univ. Paris VI and LURE/Univ. Paris (France)
Robert J. Barchewitz, Lab. de Chimie Physique/Univ. Paris VI and LURE/Univ. Paris (France)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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