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Proceedings Paper

Magnesium-silicide-based multilayers for soft x-ray optics
Author(s): Pierre Boher; Philippe Houdy; Louis Hennet; Zhigang Li; Abhijit Uday Modak; David J. Smith; M. Idir; T. Moreno; Robert J. Barchewitz; Mikhael Kuehne; Peter Mueller; Jean-Pierre Delaboudiniere
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Paper Details

Date Published: 1 January 1992
PDF: 18 pages
Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); doi: 10.1117/12.51211
Show Author Affiliations
Pierre Boher, Labs. d'Electronique Philips (France)
Philippe Houdy, Labs. d'Electronique Philips (France)
Louis Hennet, Labs. d'Electronique Philips (France)
Zhigang Li, Arizona State Univ. (United States)
Abhijit Uday Modak, Arizona State Univ. (United States)
David J. Smith, Arizona State Univ. (United States)
M. Idir, Lab. de Chimie Physique/Univ. Paris VI and LURE/Univ. Paris- (France)
T. Moreno, Lab. de Chimie Physique/Univ. Paris VI and LURE/Univ. Paris- (France)
Robert J. Barchewitz, Lab. de Chimie Physique/Univ. Paris VI (France)
Mikhael Kuehne, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Peter Mueller, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Jean-Pierre Delaboudiniere, Institut d'Astrophysique Spatiale (France)


Published in SPIE Proceedings Vol. 1546:
Multilayer and Grazing Incidence X-Ray/EUV Optics
Richard B. Hoover, Editor(s)

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