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Proceedings Paper

Effect of in-plane and out-of-plane misorientation on the ferroelectric properties of thin film ferroelectric PZT infrared sensors on Si substrates
Author(s): Ronald N. Vallejo; Sang-Ho Yun; Judy Z. Wu; Meimei Z. Tidrow; H. Braaten; C. Hansen; P. Adrent
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Paper Abstract

Pb(Zr,Ti)O3 (PZT), a promising material for uncooled infrared detection, is an anisotropic perovskite with the best pyroelectric effect observed along the c-axis. Although c-axis orientated PZT films can be easily obtained on single crystal substrates with minimal lattice mismatch, it remains a challenge in practical cases when they must be grown on non-textured polymer based sacrificial coatings over Si substrates. To address this issue, we have been focused on development of thin textured MgO templates on non-textured substrates, such as amorphous SiO2/Si and polymer coated SiO2/Si, using an ion-beam-assisted deposition (IBAD) technique. C-axis-oriented multi-layered LaNiO3/Pb(Zr,Ti)O3/LaNiO3 have been achieved and the ferroelectric properties, that impact the figure of merit for IR sensors, have been characterized.

Paper Details

Date Published: 10 October 2003
PDF: 9 pages
Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); doi: 10.1117/12.511996
Show Author Affiliations
Ronald N. Vallejo, Univ. of Kansas (United States)
Sang-Ho Yun, Univ. of Kansas (United States)
Judy Z. Wu, Univ. of Kansas (United States)
Meimei Z. Tidrow, Missile Defense Agency (United States)
H. Braaten, Raytheon Commercial Infrared (United States)
C. Hansen, Raytheon Commercial Infrared (United States)
P. Adrent, Los Alamos National Lab. (United States)

Published in SPIE Proceedings Vol. 5074:
Infrared Technology and Applications XXIX
Bjorn F. Andresen; Gabor F. Fulop, Editor(s)

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