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Proceedings Paper

Review of phase-measuring interferometry
Author(s): H. Philip Stahl
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Paper Abstract

The theory and practice of phase-measuring interferometry (PMI) are reviewed. The phase measurement algorithms are discussed and phase modulation and wavefront reconstruction are examined as part of the implementation of PMI. The performance limitations of PMI are addressed.

Paper Details

Date Published: 1 January 1991
PDF: 16 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51121
Show Author Affiliations
H. Philip Stahl, Stahl Optical Systems and Rose-Hulman Institute of Technolog (United States)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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