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Proceedings Paper

New Zeiss interferometer
Author(s): Michael F. Kuechel
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Paper Abstract

A new Zeiss interferometer, the Direct 100, is described. This interferometer contains important improvements that are especially applicable to measurements in the presence of vibrations, measurements requiring the highest spatial resolution, integration of testing into manufacturing, use of interferometry for optimum assembly of complex systems, high-precision measurements in air with sub-nm accuracies, absolute calibration of residual errors, testing of aspheres with partial compensation and electronic hologram, measurement of fast processes, and temporally resolved measurements. The measurement and evaluation principle of the Direct 100 are described along with its optics, mechanics, and electronics.

Paper Details

Date Published: 1 January 1991
PDF: 9 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51116
Show Author Affiliations
Michael F. Kuechel, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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