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Proceedings Paper

Multichannel chromatic interferometry: metrology applications
Author(s): Gilbert M. Tribillon; Jose E. Calatroni; Patrick Sandoz
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Paper Abstract

The modulation of the spectrum of a light beam is consider as a metrological tool. In particular, double spectral modulation of a Super Luminiscent Laser Diode (SLD) is used to analyze surface's profiles. Intensity and frequency modulation allows absolute measurements of the surface without any auxiliary phase shifting. Depth and lateral resolution is determined by the spectral resolution of the involved spectroscopic devices.

Paper Details

Date Published: 1 January 1991
PDF: 11 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51115
Show Author Affiliations
Gilbert M. Tribillon, Univ. de Franche-Comte (France)
Jose E. Calatroni, Univ. Simon Bolivar (Venezuela)
Patrick Sandoz, Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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