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Proceedings Paper

Interferometric measurement of in-plane motion
Author(s): Michael Hercher; Geert J. Wijntjes
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Paper Abstract

Interferometric metrology in which transverse or in-plane measurements are made is discussed. This technique can measure the displacements of diffusely scattering surfaces with microinch resolution and accuracies on the order of 0.01 percent and the displacements of relatively coarse scales with submicroinch precision and an accuracy determined by the scale itself at speeds over 100 ft/sec. The measurement principle and geometry are described and the measurement of the interferometric phase is addressed. The system design is presented.

Paper Details

Date Published: 1 January 1991
PDF: 11 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51111
Show Author Affiliations
Michael Hercher, Optra, Inc. (United States)
Geert J. Wijntjes, Optra, Inc. (United States)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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