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Proceedings Paper

Nomarski viewing system for an optical surface profiler
Author(s): Joseph Bietry; R. Anthony Auriemma; Thomas C. Bristow; Edward Merritt
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Paper Abstract

A CCD camera system has been added to a surface profiler to display Nomarski enhanced images of a surface under test. The viewing system provides an expanded view of the test surface for identifying the location and extent of surface features. Practical engineering considerations of the optical and illumination systems will be discussed. Also, examples of surface images and their respective profile scans will be shown.

Paper Details

Date Published: 1 January 1991
PDF: 7 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51102
Show Author Affiliations
Joseph Bietry, Chapman Instruments (United States)
R. Anthony Auriemma, Chapman Instruments (United States)
Thomas C. Bristow, Chapman Instruments (United States)
Edward Merritt, Chapman Instruments (United States)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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