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Proceedings Paper

Effects of the nonvanishing tip size in mechanical profile measurements
Author(s): Eugene L. Church; Peter Z. Takacs
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Paper Abstract

The high-spatial--fregiency behavior of rrethanical-profiling instrunents is determin principal ly by the non-linear geaitrica1 interaction beten the styl us tip and the surface irreularities. 'there is cons iderable interest in the nature of this interaction and its effects in practical applications. This paper explores the these issues analytically and pesents a riety of results with enphasis on the freuency-danain description. Smooth surfaces are treat1 by perturbation theory and are found to be rot4iened by tip-s ize effects , tiile rough surfaces are snoothed. In lieu of closel fotm results for rot4i surfaces, offer a simple conjecture rerding the nature of tip-s ize distortions and the rnaxinurn useable spatial freuenoj.

Paper Details

Date Published: 1 January 1991
PDF: 11 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51099
Show Author Affiliations
Eugene L. Church, U.S. Army Research & Development Command (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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