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Proceedings Paper

Micromachined vertical cavities and hollow optical waveguides for widely tunable devices
Author(s): Fumio Koyama
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Paper Abstract

We present the design and fabrication of micromachined vertical cavity filters with stress control, which give us novel functions including temperature insensitive operation, thermal wavelength tuning, wavelength trimming and 2-D multi-wavelength integration. The temperature dependence could be freely controlled either for temperature operations or for wide wavelength tuning. In addition, we propose the use of a hollow waveguide in which light can be confined in air for realizing temperature-insensitive waveguide devices. We present various unique features in hollow waveguides and the combination with microelectro-mechanical system (MEMS) gives us novel widely tunable waveguide devices.

Paper Details

Date Published: 14 August 2003
PDF: 12 pages
Proc. SPIE 5246, Active and Passive Optical Components for WDM Communications III, (14 August 2003); doi: 10.1117/12.510879
Show Author Affiliations
Fumio Koyama, Tokyo Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 5246:
Active and Passive Optical Components for WDM Communications III
Achyut K. Dutta; Abdul Ahad S. Awwal; Niloy K. Dutta; Kazuo Fujiura, Editor(s)

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