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Proceedings Paper

Holographic measurement of the angular error of a table moving along a slideway
Author(s): Kiyofumi Matsuda; Koji Tenjimbayashi
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Paper Abstract

An optical method for the precise measurement of the angular errors of a table moving along a slideway is described. The system is arranged so that angular errors of the table give rise to sideways shifts of a random wavefront generated by a ground glass screen. The shifted wavefront is made to interfere with a reconstruction of the original unshifted wavefront produced by a hologram, and the angular errors determined from the interference fringes which appear. This technique has several advantages over usual autocollimator methods.

Paper Details

Date Published: 1 January 1991
PDF: 6 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51073
Show Author Affiliations
Kiyofumi Matsuda, Mechanical Engineering Lab. (Australia)
Koji Tenjimbayashi, Mechanical Engineering Lab. (Japan)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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