Share Email Print
cover

Proceedings Paper

Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry
Author(s): Qiang Fang; Xiangyang Luo; Yushan Tan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The effect of imperfectness of detector's characteristics on measurement accuracy in phase-stepping interferometry is investigated by numerical stimulation method. Based on the results, the determination method of system parameters to achieve desired accuracy requrement is discussed.

Paper Details

Date Published: 1 January 1991
PDF: 7 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51071
Show Author Affiliations
Qiang Fang, Xi'an Jiaotong Univ. (China)
Xiangyang Luo, Xi'an Jiaotong Univ. (China)
Yushan Tan, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

© SPIE. Terms of Use
Back to Top