Share Email Print
cover

Proceedings Paper

Optical surface microtopography using phase-shifting Nomarski microscope
Author(s): Wataru Shimada; Tadamitu Sato; Toyohiko Yatagai
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed phase distribution corresponds to the differential of the surface profile under test, integration of the phase distribution gives the correct surface topography. The procedure for an analysis method and experimental results are presented.

Paper Details

Date Published: 1 January 1991
PDF: 5 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51058
Show Author Affiliations
Wataru Shimada, Univ. of Tsukuba (Japan)
Tadamitu Sato, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

© SPIE. Terms of Use
Back to Top