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Proceedings Paper

Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms
Author(s): Takashi Gemma; Masayuki Hideshima; Makoto Taya; Nobuko Watanabe
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Paper Abstract

This paper describes an interferometer system for testing aspheric surfaces with computer-generated holograms (CGHs). A CGH written by electron-beams achieves the precise testing of a wide range of aspheric surfaces. A new algorithm removes the error caused by misalignment of a CGH and a testing surface. This system can test aspheric surfaces with accuracy 2/10 (P-V value) and repeatability /5OO (RMS value).

Paper Details

Date Published: 1 January 1991
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51053
Show Author Affiliations
Takashi Gemma, Topcon Corp. (Japan)
Masayuki Hideshima, Topcon Corp. (Japan)
Makoto Taya, Topcon Corp. (Japan)
Nobuko Watanabe, Topcon Corp. (Japan)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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