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Proceedings Paper

Stoichiometry of laser-deposited Bi-Sr-Ca-Cu-O films on silicon and mass spectrometric investigations of superconductors
Author(s): J. Sabine Becker; Michael Lorenz; H.-J. Dietze
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Paper Abstract

High-Ta superconducting Bi-Sr-Ca-Cu-O films on single crystal silicon substrates were prepared by laser induced plasma deposition. The stoichiometric change of cation concentrations of sintered target material to the thin film using a Nd-YAG and an excimer laser for the deposition is compared. Laser ionization and spark source mass spectrometry (SSMS and LIMS) were applied for the trace and cluster analysis of YBa2Cu3O and Bi-Sr-Ca-Cu-O ceramics.

Paper Details

Date Published: 1 December 1991
PDF: 12 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51044
Show Author Affiliations
J. Sabine Becker, Institute of Isotope and Radiation Research (Germany)
Michael Lorenz, Institute of Isotope and Radiation Research (Germany)
H.-J. Dietze, Research Ctr. Juelich GmbH (Germany)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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