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Proceedings Paper

Applications of excimer lasers in microelectronics
Author(s): Chang Yu; Gurtej S. Sandhu; V. K. Mathews; Trung Tri Doan
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Paper Abstract

Among the newly developed techniques for thin film processing and semiconductor device fabrication, the excimer laser is one of the most promising and powerful due to its usefulness for rapid thermal processing and surface microstructure modification. To date, its applications in microelectronics include deep UV lithography, metal deposition and reflow, process monitoring and diagnostics, laser repairing, and thin film processing including high temperature superconductor material synthesis and laser enhanced chemical vapor deposition (CVD). In this paper, the status of semiconductor device metallization using excimers laser will be reviewed, and recent development in texturization of polycrystalline silicon thin films, silicide formation, and maskless patterning using excimer lasers will be presented.

Paper Details

Date Published: 1 December 1991
PDF: 12 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51043
Show Author Affiliations
Chang Yu, Micron Technology Inc. (United States)
Gurtej S. Sandhu, Micron Technology Inc. (United States)
V. K. Mathews, Micron Technology Inc. (United States)
Trung Tri Doan, Micron Technology Inc. (United States)


Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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